Tuesday, August 26, 2014

Fwd: Optical Microscope Technique Confirmed as Valid Nano-Measurement Tool



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From: National Institute of Standards and Technology (NIST) <subscriptions@nist.gov>
Date: Tue, Aug 26, 2014 at 1:00 PM
Subject: Optical Microscope Technique Confirmed as Valid Nano-Measurement Tool
To: iammejtm@gmail.com


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08/26/2014 12:36 PM EDT

Recent experiments have confirmed* that a technique developed several years ago at the National Institute of Standards and Technology (NIST) can enable optical microscopes to measure the three-dimensional (3-D) shape of objects at nanometer-scale resolution—far below the normal resolution limit for optical microscopy (about 250 nanometers for green light). The results could make the technique a useful quality control tool in the manufacture of nanoscale devices such as next-generation microchips.

NIST's experiments show that Through-focus Scanning Optical Microscopy (TSOM) is able to detect tiny differences in 3-D shapes, revealing variations of less than 1 nanometer in size among objects less than 50 nm across. Last year,** simulation studies at NIST indicated that TSOM should, in theory, be able to make such distinctions, and now the new measurements confirm it in practice.

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Jeremy Tobias Matthews

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